发明名称 |
Stage having paired E/I core actuator control |
摘要 |
A fine stage control system for use for instance in a semiconductor lithography machine, uses a pair of opposing (push-pull) E/I core actuators to move the stage with high precision along an axis. The paired actuators are coupled together mathematically in terms of their control characteristics and controlled as a single entity, thereby providing a more efficient control scheme and improved system performance.
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申请公布号 |
US6069417(A) |
申请公布日期 |
2000.05.30 |
申请号 |
US19980141762 |
申请日期 |
1998.08.27 |
申请人 |
NIKON CORPORATION |
发明人 |
YUAN, BAUSAN;TENG, TING-CHIEN |
分类号 |
G03F7/20;H02K33/12;H02K41/02;(IPC1-7):H02K41/00 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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