| 摘要 |
PROBLEM TO BE SOLVED: To provide a plasma processor capable of minimizing the dimensions thereof even with a reactor of a large diameter, and generating a plasma of required density distribution regardless of the composition of reaction gas. SOLUTION: Shutters 18, 18,... having a larger opening area than slits 15, 15,... are slidably inserted in each of cavities 16, 16,... formed inside a cover member 10. The first gear 21 having a C-shape in plan view and a plurality of teeth on the external surface is provided around the curved part 11a of the cover member 10 concentrically with the center axis of the curved part 11a. A cylindrical second gear 22 is engaged with the first gear 21 and the rotating shaft of the second gear 22 is connected to the output shaft of a stepping motor 27. A guide groove 23 is formed on the first gear 21 along the center line thereof and support pieces 31, 31,... for supporting the shutters 18, 18,... are arranged in the guide groove 23. |
