发明名称 BEAM IRRADIATION DEVICE, FOCUS CONTROLLER, OPTICAL DEVICE HAVING BEAM IRRADIATION DEVICE TO INFORMATION RECORDING MEDIUM, MANUFACTURE OF INFORMATION RECORDING MEDIUM MASTER DISK AND MANUFACTURE OF INFORMATION RECORDING MEDIUM
摘要 PROBLEM TO BE SOLVED: To make obtainable a minute beam spot and to surely and to make stably performable the focus control. SOLUTION: The beam irradiation device is provided with a beam generation source 41 generating at least any one of a light beam, an electron beam and an ion beam and a convergent lens 48 converging the beam from the beam generation source 41, and is constituted of providing at least first, second focus control mechanisms 71 and 72 respectively controlling the focus device of the beam to the same lens system constituting the convergent lens so as to focus the beam to a body 40 to be irradiated by the convergent lens 48.
申请公布号 JP2000149284(A) 申请公布日期 2000.05.30
申请号 JP19990042367 申请日期 1999.02.19
申请人 SONY CORP 发明人 YAMAMOTO MASANOBU;KASHIWAGI TOSHIYUKI;IMANISHI SHINGO
分类号 G11B7/09;G11B7/135;G11B7/26 主分类号 G11B7/09
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