| 摘要 |
PROBLEM TO BE SOLVED: To provide an alarm device for semiconductor manufacturing equipment for providing a lamp tower to be recognizable visually from a distant place and confirming the present conditions of the equipment by lightening of a lamp while a given step like ion implantation is carried out. SOLUTION: An alarm device includes a logic combining means 10 for receiving at least one signal for each condition of a given semiconductor manufacturing equipment and combining the logic, driving means 12, 14, and 16 for receiving an input as logical combination and driving a lamp, and lamps 18, 20, and 22 of a given number corresponding with 1:1 ratio to that of driving signals. Then a lamp tower 24, in which the lamps 18, 20, and 22 are lightened and recognizable according to each condition of the manufacturing equipment by using the driving signal, so a state of processing progress of each equipment can be easily judged visually from a distant place, and an erroneous accident can be dealt with easily.
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