| 摘要 |
PROBLEM TO BE SOLVED: To adjust the shading by phthalocyanine so as to enhance the transmissivity of light and to improve the purity of color by incorporating a polymerized film of a phthalocyanine compound formed by an ion plating method into an organic layer including a luminescent layer provided between transparent electrodes. SOLUTION: An organic EL element is obtained by providing an organic layer including a luminescent layer between a positive electrode and a negative electrode, at least one of which is made light-transmissive. This organic layer, preferably an electron transporting layer or a hole injection layer, is a polymerized layer of a phthalocyanine compound formed by an ion plating method. This polymerized layer is formed, for example, by using an ion plating device 1 equipped, in a vacuum tank 2, with a substrate holder 3 for holding a substrate 4, a boat 7 disposed on a heating means 6 for storing a vapor deposition source 8, and a coil electrode 9, changing Ar, etc., supplied from a gas introducing tube 13 into plasma by applying a high-frequency voltage to the coil electrode 9, ionizing a phthalocyanine compound of the vapor deposition source 8 vaporized by being heated, and depositing it on the substrate 4 to which a bias voltage is applied.
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