发明名称 |
Mechanically stabilized retaining ring for chemical mechanical polishing |
摘要 |
A carrier assembly for chemical mechanical polishing (CMP) includes a retaining ring removably attached to a rigid backing plate. The backing plate provides mechanical support over the entire load bearing surface of the retaining ring. In a further aspect of the present invention, a flexure clamp ring independent of the retaining ring for removably attaching the backing plate to the carrier assembly base Is included as part of the carrier assembly.
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申请公布号 |
US6068548(A) |
申请公布日期 |
2000.05.30 |
申请号 |
US19970992659 |
申请日期 |
1997.12.17 |
申请人 |
INTEL CORPORATION |
发明人 |
VOTE, MARION C.;ARMOUR, VANCE E. |
分类号 |
B24B37/04;B24B41/06;(IPC1-7):B24B5/00;B24B47/02 |
主分类号 |
B24B37/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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