| 摘要 |
PROBLEM TO BE SOLVED: To prevent the discharged charge from charging an electrode surface, and to enable high-efficiency and high-uniformity discharge, by installing a conductive layer having a specific sheet resistance value on a dielectric layer of at least one of facing electrodes. SOLUTION: A discharge electrode is composed of two conductors 1, 2 facing at an interval, and the conductor 1 is coated by a dielectric layer 3, and a conductive layer 4 is formed on the surface of the dielectric layer 3. An electrode terminal 51 is connected conductively to the conductor 1 so as to carry a current, and an electrode terminal 52 is similarly connected to the conductor 2. The conductor 1 and the conductor 2 are installed independently so that the electrode interval can be adjusted optionally. A sheet resistance of the conductive layer 4 is set at 1010Ω/(square) at most, and simultaneously at 10Ω/(square) or more in order to suppress uneven discharge caused by concentration of the discharged charge. The conductive layer 4 is formed by direct coating or sputtering of a metal oxide having an adjusted stoichiometric composition ratio on the dielectric layer 3 or by affixing a conductive sheet on the surface of the dielectric layer 3.
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