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发明名称
摘要
申请公布号
JP3047257(B2)
申请公布日期
2000.05.29
申请号
JP19910167143
申请日期
1991.07.08
申请人
发明人
分类号
B60L13/10;B65G49/00;B65G54/02;H01L21/677;H01L21/68;(IPC1-7):B60L13/10
主分类号
B60L13/10
代理机构
代理人
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