发明名称 CLEANING OBJECT, CHARGING DEVICE THERE FOR, METHOD FOR OPERATING CLEANING OBJECT, AND CONVEYER DEVICE FOR MANUFACTURING LINE
摘要 <p>PROBLEM TO BE SOLVED: To provide a cleaning objects, a charging device for it, a method for operating a cleaning object, and a conveyer device for a manufacturing line wherein a minute charged foreign object is prevented from sticking to a product in a manufacturing process when the manufacturing line is used for an extended time, where a lot of minute foreign objects take place suddenly, or even at storage. SOLUTION: Related to cleaning objects 21 and 22 which coexist with a product 10 in a manufacturing process being present in the air where charged minute foreign objects float and prevent the charged minute foreign objects from sticking to the product, they are forced to be at least positive charge or negative charge for electrostatically attracting minute foreign objects. A method for operating the cleaning object is provided wherein the product 10 in the manufacturing process is transported by a conveyer in the manufacturing line, and the cleaning objects 21 and 22 are transported together with it.</p>
申请公布号 JP2000150443(A) 申请公布日期 2000.05.30
申请号 JP19980315087 申请日期 1998.11.05
申请人 MITSUBISHI ELECTRIC CORP 发明人 HIRANO NORIKO;FUJINO NAOHIKO;MASUDA TAKASHI;BABA FUMIAKI
分类号 H01L21/673;H01L21/02;H01L21/304;H01L21/68;(IPC1-7):H01L21/304 主分类号 H01L21/673
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