SPUTTERING TARGET AND ITS MANUFACTURE

摘要

PROBLEM TO BE SOLVED: To prevent the occurrence of abnormal electric discharge due to the division sections of a target having the division sections and to prevent the adhesion of particles due to the abnormal electric discharge. SOLUTION: In a multidivision-type sputtering target constituted by joining plural target members onto a backing plate by the use of a bounding agent, clearances between respective target members are filled. with an alloy having a melting point higher than that of the bonding agent or an alloy capable of filling the clearances between respective target members at a temperature below the melting point of the bonding agent and having a melting point higher than that of the bonding agent after the completion of filling.