| 摘要 |
PROBLEM TO BE SOLVED: To enable a chemically amplifying negative resist compsn. containing an alkali soluble resin, radiation-sensitive acid producing agent and crosslinking agent crosslinkable with an acid to satisfy characteristics of sensitivity, resolution and resist profile when electron beams or X-rays are used by satisfying at least one condition of specified conditions. SOLUTION: In the chemically amplifying negative resist compsn. containing an alkali-soluble resin, radiation-sensitive acid producing agent and crosslinking agent with crosslinks with an acid, at least one condition in the following conditions is satisfied. The conditions are that (1) the radiation-sensitive acid producing agent is a compd. expressed by formulae I, II or the like, and that (2) the crosslinking agent is a low mol.wt. phenolic deriv. having <=1000 mol.wt. and a specified structure. In the formulae I and II, each of R1 to R27 may be same or different and represents a hydrogen atom, straight-chain, branched or cyclic alkyl group, straight-chain, branched or cyclic alkoxy group, hydroxy group, halogen atom or the like and X is at least one fluorine atom or the like. |
