| 摘要 |
PROBLEM TO BE SOLVED: To obtain an ellipsometer by which the film thickness or the like of a sample can be measured with high accuracy by a method wherein an incident polarization generation unit changes the phase difference of light incident on a sample based on information on the phase difference of the sample to adjust the phase difference of incident light on a rotary analyzer. SOLUTION: This is provided with incident polarization generation units 2 and 3 by which specific polarized light is incident on a sample 4, a detector 6 arranged in the optical path of light which is passed through the sample 4, and a rotary analyzer 5 which can be turned by using the advance direction of the light as an axis. The incident polarization generation units 2, 3 can change the phase difference of the light incident on the sample 4 based on information on the phase difference of the sample 4. Thereby, light from a light source 1 is transmitted through a polarizer 2, and then transmitted through the phase plate 3 so as to generate specific polarized light. The polarized light is transmitted through, or reflected from, the sample 4 so as to be incident on the rotary analyzer 5 rotation with an optical axis AX as the center. Then, the light transmitted through the rotary analyzer 5 is detected by the detector 6.
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