| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat treatment apparatus and a heat treatment method, with which the effect of impurity is hardly exerted upon a material to execute the heat treatment even in the case impurity source in a furnace which can exert adverse effect upon the material to execute the heat treatment. SOLUTION: The heat treatment apparatus 20 is provided with a first chamber 3 possible to close, a second chamber 4 arranged in the first chamber 3 and graphite heaters 6 arranged at the outer part of the second chamber 4 in the first chamber 3. The second chamber 4 is provided with a gas introducing hole 21 for directly introducing atmospheric gas into a treating space 7 and an opening part 9, at which the atmospheric gas can be made to flow out to the outer part of the second chamber 4. The second chamber 4 is divided into a body part 8a and cover parts 8b, 8c and the cover parts 8b, 8c are supported so as to be shiftable to the body part 8a. Plural gaps are formed between the body part 8a and the cover parts 8b, 8c, and each of plural gaps functions as the opening part 9. The cover parts 8b, 8c can tightly adhere to the body part 8a and the opening part can temporarily be closed during heat treatment process. |
