| 摘要 |
PROBLEM TO BE SOLVED: To obtain optical parts which maintain high performance over a long period of time by bringing a perfluoroalcohol into contact with the surfaces of optical parts and irradiating the contact parts with UV to fix perfluoroalkyl groups on the surfaces of the optical parts. SOLUTION: A UV cleaning step (a) for obtaining a clean surface as pretreatment, a step (b) for dropping and applying a perfluoroalcohol and a UV irradiation step (c) are carried out. In the step (a), an optical member to be treated is disposed near light sources which emit UV such as mercury lamps and the member is irradiated with UV to remove organic matter and gas adsorbed on the surface. In the step (b), the perfluoroalcohol is brought into contact with the surface of the optical member. In the step (c), the surface kept in contact with the perfluoroalcohol is irradiated with UV to fix perfluoroalkyl groups on the surface. In order to fix the groups, light having sufficient light energy to activate hydroxyl groups in the perfluoroalcohol is required. |
