| 摘要 |
PROBLEM TO BE SOLVED: To improve reliability by compensating temperature change or the like at the time of inspecting the characteristics of an element to be inspected by updating the measured value of a master element as necessary. SOLUTION: An element 15 to be inspected and a mater element 24 are constituted of zirconia tubes 1, and electrostatic capacities between those inner electrodes 2 and outer electrodes 3 are measured by measuring equipment 28 and probes 20-22, 26, and 27. Then, a controller 30 successively inspects whether or not the plural elements 15 to be inspected are made correspond to specification on design by using the measured value of the master element 24. Also, the controller 30 measures a switching relay 29 for measuring the electrostatic capacity of the master element 24 during this inspection, and updates the measured value or the like in each fixed time. |
