发明名称 METHOD AND APPARATUS FOR INSPECTING SURFACE UNEVENNESS OF TRANSPARENT BOARD
摘要 PROBLEM TO BE SOLVED: To prevent rear reflection of a transparent board, and to inspect its surface unevenness precisely, using a usual light source and a screen. SOLUTION: Influence by rear reflection of a transparent board 3 is prevented, by making the angle of incidence of a light source 1 to the transparent board 3 86-89 degrees by normal reference, or making the light source 1 P-polarized light or S-polarized light, and making its angle of incidence 60-89 degrees by normal reference by the use of a polarizing element (polarizing board 2) arranged between the light source 1 and the transparent board 3. And a reflected image projected to a screen 4 by the reflection of the front surface is visually observed directly, or a monitor image obtained by picking up the reflected image by a camera is visually observed, or the reflected image picked up by the camera is processed arithmetically as a shaded signal by a picture processor. Consequently, it becomes possible to inspect the surface roughness of the transparent board 3.
申请公布号 JP2000146554(A) 申请公布日期 2000.05.26
申请号 JP19990191167 申请日期 1999.07.06
申请人 CENTRAL GLASS CO LTD 发明人 OKUGAWA SHINYA
分类号 G01B11/30;G01N21/896;G01N21/958;(IPC1-7):G01B11/30 主分类号 G01B11/30
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