SCANNING PROBE MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of easily adjusting the incident position of light upon a photodiode. SOLUTION: A light incident position computing means 8 computes the center position of light incident upon a photodiode 7 from the proportion of signal intensity of each light receiving element. An enlarged figure of light receiving surfaces of the quadripartite photodiode 7 is displayed on a display screen of a display device 11 controlled by a display control means 10. The display control means 10 receives a signal expressing the center position of the incident light and displays a circular marker centering around a point corresponding to this center position on the light receiving surface figure such that it is superimposed on the light receiving surface figure. An operator adjusts a photodetector adjusting means 13 so that the center of the marker comes to the center of the light receiving surface figure.