| 摘要 |
PROBLEM TO BE SOLVED: To provide a pure Ru target capable of improving filling density at the time of using hot isostatic pressing, also capable of preventing nonuniform deformation and cracking during hot isostatic pressing, and having excellent structure, and its manufacturing method. SOLUTION: As a manufacturing method for obtaining an Ru target composed of a powder sintered compact of >=99% relative density and >=99.99% purity, a reduced Ru powder is pulverized and sealed in a hermetically sealed vessel to undergo hot isostatic pressing, by which relative density is regulated to >=99%. In this manufacturing method of the Ru target, it is preferable that pulverizing treatment is performed to <=50μm volume average diameter.
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