发明名称 SPIN DRYER
摘要 PROBLEM TO BE SOLVED: To provide a dryer in which occurrence of contamination or chipping of a work can be suppressed. SOLUTION: Upper and lower cases 111A, 111B are coupled through four coupling shafts 112 having a hollow shaft hole connecting the inner bottom parts thereof while facing the openings each other and a slight gap is formed between the edge of opening of both cases 111A, 111B. A plurality of ejection openings 112b communicating with shaft hole 112a are made in the outer circumferential surface of the coupling shaft 112 while directing the central axis of rotation of the case body 111 in order to direct the air being fed to the shaft hole 112a toward the central direction in the case body.
申请公布号 JP2000146435(A) 申请公布日期 2000.05.26
申请号 JP19980321660 申请日期 1998.11.12
申请人 TOOWA:KK 发明人 UMEZAWA MAKOTO;HORITAKE SHIGERU
分类号 B04B3/00;F26B5/08;H01L21/304;(IPC1-7):F26B5/08 主分类号 B04B3/00
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