发明名称
摘要 An apparatus of scanning near-field optic/atomic force microscope capable of measuring the surface topography and optical characteristics of a sample at high resolution, irrespective of whether the sample transmits light or whether it is conductive. A laser, a condenser lens, and a photoelectric converter device are installed above a cantilever having a probe. Laser light from the laser is focused onto the back surface of the cantilever by the condenser lens, and the reflected light is introduced into the photoelectric converter device. Light emanating from a light source for measurement of optical information is directed to a sample from its back surface via a collimator lens, the sample being placed on a prism. The light is introduced into the front end of the probe close to the sample, and introduced into the photoelectric converter device via the light-transmitting device. The operation of the whole apparatus is controlled by a computer. <IMAGE>
申请公布号 JP3047030(B2) 申请公布日期 2000.05.29
申请号 JP19930276708 申请日期 1993.11.05
申请人 发明人
分类号 G01B11/30;G01B7/34;G01N37/00;G01Q60/06;G01Q60/18;G01Q60/32;G02B21/00;(IPC1-7):G01B11/30;H01J37/28 主分类号 G01B11/30
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