| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning probe microscope capable of separately measuring frictional force deriving from surface force such as adsorptive force corresponding to the surface conditions of a sample and frictional force caused by the coefficient of friction of the surface of the sample. SOLUTION: This scanning probe microscope is equipped with a vibration mechanism for vibrating a tip (probe 4) of a cantilever 6 in order to modulate pressing force of the tip (probe 4) of the cantilever 6 against a surface of a sample 2, a scanning mechanism for causing the probe 4 to relatively scan the sample surface, a detection mechanism capable of detecting the amount of torsion of the cantilever 6 produced when the probe 4 scans the sample surface and detecting the amount of deflection of the cantilever 6 produced by the pressing force modulated by the vibration mechanism, and a measurement mechanism capable of separately measuring surface force such as adsorptive force corresponding to the surface conditions of the sample and the coefficient of friction of the surface of the sample based on the amount of torsion and amount of deflection of the cantilever 6 detected by the detection mechanism.
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