| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain an acoustooptical deflector in which failure such as optical damage or the like are never generated by deflecting light propagating in a light guide layer while exciting a Sezawa wave in the light guide layer with comb-line electrode. SOLUTION: A ZnO film (piezo-electric thin film light guide layer) 5 is provided on the surface of a sapphire substrate 1. Moreover, an IDT(inter-digital- transducer) 6 and gratings 7, 8 as an input-output means are formed on the ZnO film 5. In such constitution, a laser beam LB from a light source in which a semiconductor laser is made to be a light source is made incident on this deflector. This laser beam LB is inputted from the grating 7 to the ZnO film 5 to be propagated. At this time, a high frequency signal is impressed on the IDT 6 from a power source 10 and a surface acoustic wave (Sezawa wave) SA propagating in a direction roughly orthogonal to a guided light in the ZnO film 5 is excited. Then, the guided light (laser beam LB) is deflected by the mutual action with this elastic wave to be emitted to the outside from the grating 8. Thus, a high electromechanical coupling coefficient is obtained.</p> |
