| 摘要 |
<p>PROBLEM TO BE SOLVED: To tremendously shorten the inspection time over the entire part by shortening the time required for alignment. SOLUTION: When the optical image acquired from a reticle 1 and the reference image for writing the reticle are going to be aligned, the inspection surface of the reticle 1 is divided to plural frames and the comparison of the optical image and the reference image is carried out by each of respective frames. The alignment to be carried out on the occasion of the comparison is carried out by referencing the offset quantity of the alignment carried out in the previous step.</p> |
