| 摘要 |
<p>PROBLEM TO BE SOLVED: To obtain excellent light resistance and transmitting property for UV rays by forming antireflection layers on both surfaces of a base body made of a dense metal oxide and constituting the antireflection layer of a porous metal oxide thin film. SOLUTION: A pellicle film or plate 1 consists of a dense metal oxide base body 2 and antireflection layers 313 formed on both surfaces of the base body 2. The antireflection layers 3, 3 consist of porous metal oxide thin films. By forming the porous metal oxide films on both surface of the dense metal oxide base body, deterioration due to short wavelength light such as vacuum UV rays can be prevented while effective antireflection can be obtd. on the surfaces. Therefore, even when the pellicle is to be used for UV rays, especially vacuum UV rays, the inorg. antireflection layers having excellent transmitting property and antireflection performance can be formed and the pellicle has excellent light resistance and transmitting property for UV rays. Moreover, deterioration of the pellicle by light is suppressed and a fine pattern can be formed.</p> |
