| 摘要 |
PROBLEM TO BE SOLVED: To provide hardness similar to that of diamond, thermal conductivity, and excellent insulating property by constituting a wear resistant film, which is formed on a silicon film on an insulated surface, so that it is composed of carbon or composed essentially of carbon and consists of an amorphous film or a film having microcrystals of specific size. SOLUTION: A silicon heat generating body layer 3, an electrode 4, etc., are laminated on a glass layer 2 formed on a ceramic substrate 1 by glazing, on which a wear resistant layer 5 is further provided. In this thermal printer, a film, which is composed of carbon or composed essentially of carbon and consists f an amorphous film or a semi-amorphous film having microcrystals of a size of 0.5-2 nm, is used as the wear resistant layer 5. This film is an insulator having characteristics similar to those of diamond, that is, >=4500 kg/mm2 Vickers hardness, >=2.0 eV energy band width, and >=2.5 W/cmdeg thermal conductivity. This film can contain <=30 mole% of hydrogen or silicon, if necessary. |
