| 摘要 |
PROBLEM TO BE SOLVED: To enable machining of a desired ultrafine structure with good accuracy and to produce an optical element at a low cost. SOLUTION: A protecting jig 2 is attached to the rear surface of a substrate 1 made of a quartz transparent parallel plate, and the jig 2 is made of an aluminum thin parallel plate of the same diameter as the substrate. The substrate 1 and the jig 2 are disposed in such a manner that the faces not mounting on each other are parallel to each other with good accuracy. The jig 2 is made of an aluminum material or the like which transmits or reflects light so that it can be detected by a transmission type or reflection type substrate detecting sensor in a device in a semiconductor production process.
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