| 摘要 |
PROBLEM TO BE SOLVED: To reduce the amount of oxygen in a target stock during powder sintering in the manufacture of a powder sintered target material by hot isostatic press. SOLUTION: In the manufacturing method of the target material, a raw- material powder to be a target stock is sealed in a metallic capsule and powder sintering is performed by hot isostatic press. In this method for manufacturing the target material, a getter metal, whose oxide formed at sintering temperature has an oxygen dissociation pressure lower than that of an oxide formed by a metallic element in the raw-material powder, is allowed to exist in the area to be in contact with the target stock inside the metallic capsule.
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