| 摘要 |
PROBLEM TO BE SOLVED: To provide a bellows device for vacuum equipment connection, capable of providing large conductance and keeping a balance in the small inner area of a vacuum side and irrespective of a pressure in a bellows. SOLUTION: A first bellows 7 is disposed between the first duct 2 of a first vacuum equipment A and the second duct 5 of a second vacuum equipment B, a second bellows 8 and a third bellows 9 smaller in diameter than second bellows 8 are disposed between a tip flange 3 in the tip of the first duct 2 and the hollow circular plate 6c of an outer bellows attaching portion 6 in the tip portion of the second duct 5, air in the first and second vacuum equipments A and B and in the first bellows 7 is evacuated by the high vacuum pump 11b of an evacuator 11, air in a space S formed between the second bellows 8 and the third bellows 9 is evacuated through a vacuum suction branch pipe path 10 by a rough suction vacuum pump 11c.
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