| 摘要 |
PROBLEM TO BE SOLVED: To obtain high characteristics by further suppressing the occurrence of a warp. SOLUTION: The substrate type optical waveguide manufacturing method has a process for forming a core layer 2 on a quartz substrate 1 by using an electron beam vapor deposition method, a process for patterning the core layer 2, a process for forming a porous clad layer 6 on the substrate 1 by using a flame depositing method so as to cover the patterned core layer 2, and a process for converting the layer 6 into transparent glass by heat treatment to form a clad layer 7. The patterning of the core layer 2 is executed so as to leave a core 4 forming an optical circuit and a warp suppressing layer 5 which is almost all the surface of a part forming no cores 4 and separated from the core 4 at a prescribed interval or more. |
