| 摘要 |
PROBLEM TO BE SOLVED: To provide a power applying device which is capable of suppressing the discharge impedance low even in a case using the output wave of high frequency, easily controlling the phase, and preventing damages in forming a film, and a power applying method. SOLUTION: A power applying device is provided with a single oscillator, a distributor 2 and power amplifiers, progressive multipliers 3-3n provided for one half of the power amplifiers in a first stage, and a synthesizer which synthesizes the first power output wave to output from the power amplifiers through the progressive multipliers with the second power output wave to output from the power amplifiers without through the progressive multipliers after the impedance matching, and feeds the power based on the synthesized output wave to a specified target.
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