| 摘要 |
<p>PROBLEM TO BE SOLVED: To enable the measurement up to a high flow velocity range to be carried out with a simple structure and raise the heat stress resistance by forming a heat coupling film for enhancing the heat coupling between a heating body and a temp. sensing element. SOLUTION: The heat coupling film 10 is composed of a Pt film of the same material as that of a heater 3 and temp. sensing elements 5, 6. This structure enhances the heat couplings between the heater 3 and the upstream and downstream temp. sensing elements 5, 6 enough to avoid lowering the temp. down to nearly a fluid temp. at the upstream element 5 during increasing of the flow velocity and allows the flow velocity to be leveled up at which cooling begins with a flow of water rather than heating by the heater 3 at the downstream element 6, thus measuring at high sensitivities up to a high flow velocity range. The heater 3 and the sensing elements 5, 6 are disposed nearly the film center of the film structure with a lower and upper films symmetrically disposed on the upper and lower sides thereof to provide a structure strong against the heat stress, without causing a warping variation against the temp. change.</p> |
