发明名称 MANUFACTURE OF CONTACT PROBE FOR ELECTRICAL INSPECTION
摘要 PROBLEM TO BE SOLVED: To readily realize a method of easy manufacturing of a contact probe, using a low-resistance and high-strength conductive polymer by absorbing an oxidizer in a resin-made pattern and polymerizing conductive high molecular monomers. SOLUTION: A probe-like (protrudent) photosensitive resin layer 3 is formed on an electrode pad 2 of a wiring board 1, a conductive layer 4 of a composite of a conductive polymer with a photosensitive resin is formed thereon to form a probe (pattern) 12, the probe 12 is contacted to an oxidizer soln. 5 contg. a high-valence transition metal salt to osmose the oxidizer with a solvent, the probe 12 having absorbed the oxidizer is contacted to and react with a conductive high molecular monomer liq. 7, to form a thicker conductive layer 4 composed of conductive high molecules and the photosensitive resin on the photosensitive resin layer 3, and the process is repeated until saluration is reached, and the oxidizer is supplied from the soln. 5 to increase the forming quantity of the conductive high molecules.
申请公布号 JP2000147007(A) 申请公布日期 2000.05.26
申请号 JP19980327267 申请日期 1998.11.17
申请人 NEC CORP 发明人 ITAGAKI YOSUKE;SATO MASAHARU;KUSUMI HAJIME;NAKADA DAISAKU
分类号 H05K3/00;G01R1/073;H01L21/66;(IPC1-7):G01R1/073 主分类号 H05K3/00
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