| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a multi-layer film spectral element for X-ray fluorescence analysis of boron that can perform an X-ray fluorescence analysis of boron (B) with high accuracy and in a short time. SOLUTION: In this multi-layer film spectral element, ruthenium(Ru) or molybdenum(Mo) is used for a reflecting layer 31 and boron(B) for a spacer layer 32, and the period length is set at 7.5 nm or longer, and the number of layer pairs at 20 or more. As a result, the reflective intensity of boron fluorescent X rays is about 50% or higher of the theoretical reflective intensity in a theoretical structure. Thereby, the reflective intensity is increased by 30% or higher, as compared with in the conventional Mo/B4C(boron carbide) multi- layer film spectral elements, and makes it possible to analyze boron fluorescent X rays with higher accuracy and in shorter time.</p> |
