SAMPLE ANALYSIS METHOD AND SAMPLE PREPARATION METHOD AND DEVICE THEREFOR

摘要

PROBLEM TO BE SOLVED: To analyze a part of interest in the direction of the plane and the cross-section by machining a fine thin-piece sample into a sectional sample in a direction that is vertical to the surface of the thin-piece sample and observing the section by a transmission electron microscope(TEM) or scanning transmission electron microscope(STEM). SOLUTION: A calculation processing part 15 controls a stage control part 10, a transport means control part 11, a secondary particle detector control part 12, a deposition gas source control part 131, an FIB control part 14, and the like, and further can store or process SIM image information and image information from a TEM. In addition, an image display part 16 can display the TEM image and a processed image as well as the SIM image and further can display the SIM image processed by the processing part 15 and the TEM image while they are overlapped each other. Further, networking is made with a main computer as a center, and a sample shape and element information data by a sample-preparing device and the TEM can be registered in a database via a network, thus integrally controlling the SIM image, TEM image, and processed image and recalling the image information or the like.