发明名称 METHOD OF ADJUSTING INTERFERENCE METER, AND APPARATUS THEREFOR
摘要 PROBLEM TO BE SOLVED: To make adequately correctable the deviation of the optical axis of an interferometer by moving a beam splitter at right angles to its semi- transmissible plane through beam splitter position adjusting means, and moving a fixed mirror at right angles to its optical axis through fixed mirror position adjusting means. SOLUTION: Beam splitter position adjusting means 126 moves and adjusts a beam splitter 114 at right angles to its semi-transmissible plane 130. After the splitter 114 is replaced, an interferometer emits a light which is then reflected from a moving mirror 118 and superposed on the pass course of an interfering light emitted from the interferometer after replacing the splitter 114. Fixed mirror position adjusting means 128 moves and adjusts a fixed mirror 116 at right angles to its optical axis through fixed mirror position adjusting means. After the splitter 114 is replaced, the interferometer emits a light which is then reflected from the fixed mirror 116 and superposed on the pass course of an interfering light emitted from the interferometer after replacing the splitter 114. The fixed and moving mirrors 116, 118 use corner cubic mirrors.
申请公布号 JP2000146695(A) 申请公布日期 2000.05.26
申请号 JP19980328250 申请日期 1998.11.18
申请人 JASCO CORP 发明人 SOGA YOSHIAKI;MINEO HIROSHI;SEO TSUGIO;TSUKADA HIROSHI;NAGOSHI TOSHIYUKI
分类号 G01B9/02;G01J1/06;G01J3/45;(IPC1-7):G01J3/45 主分类号 G01B9/02
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