PRODUCTION OF TRANSPARENT ELECTRICALLY CONDUCTIVE LAYERED PRODUCT

摘要

PROBLEM TO BE SOLVED: To provide a method for forming a low-resistance transparent electrically conductive film consisting essentially of In-Sn-O a polymer substrate by sputtering. SOLUTION: A transparent electrically conductive layered product is formed on a polymer substrate by using a target consisting essentially of In-So-O. In this method, the partial pressure ratio of oxygen to water is controlled to 10 to 1000 and that of water to inert gas to 1.3×10-5 to 2.5×10-4, and the transparent electrically conductive film is formed on the polymer substrate in the atmosphere kept at <80 deg.C and then heat-treated at a temp. not exceeding the glass transition temp. of the polymer substrate in the atmosphere of oxygen.