| 摘要 |
PROBLEM TO BE SOLVED: To provide a thermal infrared detecting element which is provided with a spectral characteristic which is nearly flat with respect to a wavelength band which is longer than a certain wavelength. SOLUTION: This thermal infrared detecting element is composed of a lower- layer part which is composed of a substrate 2 comprising a total reflection coating 1. In addition, it is composed of an upper-layer part which is composed of a diaphragm 10 comprising a bolometer thin film 5 and an infrared absorption film 7 which are surrounded by an insulating protective film 3 and an insulating protective film 6. The upper-layer part is supported by a plurality of beams 12, 12' by keeping an interval from the lower-layer part. Ends, on one side, of the respective beams are fixed to a bank 16, their ends on the other side are connected to the diaphragm via a connection part 13 and a connection part 13', and the diaphragm is supported between the connection parts 13, 13'. The respective beams are deformed by an internal stress due to the difference in a coefficient of thermal expansion and in a molding temperature so as to generate a warp. The diaphragm 10 is tilted with respect to the lower-layer part.
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