发明名称 AUTOMATIC CONTROL SYSTEM OF CLEARANCE BETWEEN ELECTRODES
摘要 PURPOSE: An automatic control system of a clearance between electrodes is provided to control the parallelism of the clearance by monitoring the clearance through encoders on the upper ends of a lead screw. CONSTITUTION: Lead screws(51-54) are installed on four positions to move a clearance housing(50) up and down by receiving drive force from a clearance control motor. Herein, the upper and the lower portions of the clearance housing are connected. Encoders(55-58) are mounted on the upper portions of the four lead screws respectively to evaluate the clearance between electrodes. Therefore, each encoder controls the clearance parallelism by moving the lead screws clockwise or counterclockwise.
申请公布号 KR20000028102(A) 申请公布日期 2000.05.25
申请号 KR19980046238 申请日期 1998.10.30
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 PARK, BONG JIN
分类号 H01L21/3065;(IPC1-7):H01L21/306 主分类号 H01L21/3065
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