| 摘要 |
<p>A laser chamber with a circuitous gas return path dissipates shock waves in the gas generated by the electrodes. The laser chamber (100) may include a heat exchanger (106) with a large surface aerodynamic passage (109) through which gas circulates. The passage directs shock waves away from the discharge region to dissipate elsewhere. Ancillary chambers (210, 212) that are fluidically coupled to the main laser chamber can be used to permit shock waves to be directed away from the discharge area and be dissipated in the ancillary chambers. Blowers (220, 222) or flow vanes may be used in the ancillary chambers to circulate gas. Circulating gas within the laser chamber remains uniform and stable.</p> |
