METHOD OF MANUFACTURING ANGULAR-RATE SENSOR

摘要

PURPOSE: A method of manufacturing an angular-rate sensor is provided to reduce the costs and the steps for manufacturing by using low cost silicon wafers. CONSTITUTION: Components of the angular-rate sensor are manufactured on a silicon substrate(3). The components of the angular rate sensor(1) includes one or more masses (20), a support beam and buried conductors(7). one or more masses (20), a support beam are arranged to have an inclination to bend in neither vertical direction or level direction. Detectors(21) are provided and the components are sealed in a cavity between a first glass plate(18) and a second glass plate (19) by anodic bonding. This enables angular rate sensors to be fabricated.