| 摘要 |
PURPOSE: An apparatus for detecting angular velocity is provided to minimize a detectable error by reducing influences of manufacturing variation, non-linear character of a beam, and vibration by Coriolis' force of a vibrator. CONSTITUTION: A vibrator(20) connected by beams(33-1,33-2,33-3-33-4) and main frames(30-1,30-2) are installed spacing from an upper surface of a substrate(10). The vibrator(20) and the main frames(30-1,30-2) are driven by driving electrode parts(51-1,51-2,51-3,51-4) in a direction of the x-axis. The vibrator(20) vibrates by angular velocity of the z-axis rotation at right angles to both x, y-axis. Angular velocity is detected by measuring the vibration of the y-axis direction using a high frequency signal granted to detecting electrode part(53-1,53-2,53-3,53-4). The driving electrode parts(51-1,51-2,51-3,51-4) is respectively installed the main frame(30-1,30-2) divided in the direction of the y-axis and have independent driving signal so that the main frame(30-1,30-2) are accurately driven.
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