AIR VALVE FOR SEMICONDUCTOR PREPARATION DEVICE

摘要

PURPOSE: An air valve operated by compressed air is provided to easily confirm an open and a close states of a valve from outside. CONSTITUTION: An air valve(500) includes a piston(523) rising by the elasticity of a spring(526), a valve stem(522) installed on the bottom of the piston also rising with the piston when the air valve is in a cylindrical state without supply of compressed air. Herein, a valve head(525) separated from a valve seat(514) opens a fluid channel(511). The piston is placed on the upper part in an opening and closing operation part(520) by the spring when the air valve is closed so that the compressed air is not supplied via an air supply channel(533). And a tag(532) is pushed in the direction of A by a spring for a tag. Thereby, an "OPEN" sign of the tag is displayed via a transparent window(535).