EQUIPMENT FOR PRODUCING SEMICONDUCTOR DEVICE CONTAINING CHUCK

摘要

PURPOSE: An equipment for producing a semiconductor device containing a chuck is provided to embody the improvement of the productivity by preventing the generation of a quality accident with securing the position fixed state of the chuck with a fixation pin. CONSTITUTION: An equipment for producing a semiconductor device puts a semiconductor substrate in the front and is equipped a chuck(100) formed a pin hole(210) in the rear face. A fixation pin(200) is inserted into the pinhole(210). A combining device prevents the separating of the fixation pin(200) from the chuck(100) by combining the fixation pin(200) inserted in the pin hole(210) in the chuck(100). A first combining screw hole(330) is formed in the one end inserted the fixation pin(200) in the pin hole(210). A second combining screw hole(310) to penetrate from the side of the chuck(100) to the side wall of the pin hole(210) is formed, and the second combining screw hole(310) is arranged in the first combining screw hole(330) of the fixation pin(200). The fixation pin(200) is combined in the chuck(100) by inserting a combining screw(300) in the first combining screw hole(330) and the second combining screw hole(310). Therefore, the fixation pin inserted in the chuck(100) is fixed in the chuck(100), and is not separated by an up and down movement of the chuck(100). The accident of quality and the defect of equipment are prevented not by separating the fixation pin(200) from the pin hole(210) when the equipment is operated.