发明名称 CONVEYOR SYSTEM
摘要 A conveyor system comprising a first arm (29) and a second pulley that are turned integrally with a first drive shaft driven for rotation, a second arm (30) and a first pulley that are turned integrally with a second drive shaft coaxial with the first drive shaft and driven for rotation, third and fourth pulleys that are respectively rotatably mounted on the ends of the first and second arms, and first and second belts respectively passed around the first and third pulleys and around the second and fourth pulleys, wherein first and second revolving members (41, 42) respectively fixed to the third and fourth pulleys and holding members (49, 49a) for holding an object to be conveyed are connected by parallel link mechanisms (43, 44) respectively installed on the first and second revolving members, and the outer diameter ratio between the first and third pulleys is set at 1 : 2 and the outer diameter ratio between the second and fourth pulleys is set at 1 : 2.
申请公布号 WO0030173(A1) 申请公布日期 2000.05.25
申请号 WO1999JP06410 申请日期 1999.11.17
申请人 TOKYO ELECTRON LIMITED;MATSUSHIMA, KEIICHI 发明人 MATSUSHIMA, KEIICHI
分类号 B25J9/06;B25J9/10;H01L21/677;(IPC1-7):H01L21/68;B25J17/00;B65G49/07 主分类号 B25J9/06
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