发明名称 AIR KNIFE AND DRY PROCESSING SYSTEM EMPLOYING IT
摘要 PROBLEM TO BE SOLVED: To provide an air knife which can be assembled easily and accurately. SOLUTION: An air knife comprises a first planar member 18, a second planar member 19 being jointed thereto and forming a knife body 17 in conjunction with the first planar member 18 having a space part 29 being supplied with compressed air between the joint faces, a first inclining face 21 formed on the joint face between the first and second planar members at one end of the first planar member while inclining at a specified angle with respect to the joint face, a second inclining face 27 formed at one end of the second planar member while inclining at a substantially same angle as the first planar member and forming a slit for ejecting compressed air supplied to the space part from one end side of the knife body in conjunction with the first inclining face, and a screw for coupling the first and second jointed planar members at a specified slide position by means of screws.
申请公布号 JP2000146443(A) 申请公布日期 2000.05.26
申请号 JP19980319083 申请日期 1998.11.10
申请人 SHIBAURA MECHATRONICS CORP 发明人 YAMAZAKI TAKAHIRO;KANEKO KATSUNORI
分类号 H01L21/304;F26B15/12;F26B21/00;(IPC1-7):F26B21/00 主分类号 H01L21/304
代理机构 代理人
主权项
地址