发明名称 |
AIR KNIFE AND DRY PROCESSING SYSTEM EMPLOYING IT |
摘要 |
PROBLEM TO BE SOLVED: To provide an air knife which can be assembled easily and accurately. SOLUTION: An air knife comprises a first planar member 18, a second planar member 19 being jointed thereto and forming a knife body 17 in conjunction with the first planar member 18 having a space part 29 being supplied with compressed air between the joint faces, a first inclining face 21 formed on the joint face between the first and second planar members at one end of the first planar member while inclining at a specified angle with respect to the joint face, a second inclining face 27 formed at one end of the second planar member while inclining at a substantially same angle as the first planar member and forming a slit for ejecting compressed air supplied to the space part from one end side of the knife body in conjunction with the first inclining face, and a screw for coupling the first and second jointed planar members at a specified slide position by means of screws.
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申请公布号 |
JP2000146443(A) |
申请公布日期 |
2000.05.26 |
申请号 |
JP19980319083 |
申请日期 |
1998.11.10 |
申请人 |
SHIBAURA MECHATRONICS CORP |
发明人 |
YAMAZAKI TAKAHIRO;KANEKO KATSUNORI |
分类号 |
H01L21/304;F26B15/12;F26B21/00;(IPC1-7):F26B21/00 |
主分类号 |
H01L21/304 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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