| 摘要 |
PURPOSE: A system and a method for transporting the mixed gas mixture, having a regular composition in an unsaturated state. CONSTITUTION: A liquid phase TCS(Trichlorosilane) supplying source(12) is comprised of a line(14), a heater(18), an atmospheric separation ion valve(16), a device supplying source(86), a temperature indication controller(24), a temperature member(22), a control(20), a pressure converter(28), a temperature indicator(34), a pressure indicator(30), a pressure indication switch(40), a high pressure switch(42), a breakage disk(36) and a safety valve(38). Herein, the heated non-active gas is flowed to the line(54), passing through the line(240) from a flux member(238) and is mixed with the mixed TCS/H2. Thereby, the dew point of the mixed stream is reduced, not affecting on a proper mole ratio between TCS and H2 if non-active gas as a third element among the mixed gas mixture is added up.
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