METHOD FOR PURIFYING CRYOGENIC FLUIDS CONTAINING IMPURITIES SUCH AS N2O, CNHM AND/OR NOX

摘要

PURPOSE: A method is provided to effectively remove N2O, CnHm and/or NOx easy to be existed in cryogenic fluids such as nitrogen, oxygen, helium, hydrogen or argon. CONSTITUTION: A cryogenic fluid is purified by the steps of: removing at least a part of impurities contained in a cryogenic fluid desired to be purified by contacting the cryogenic fluid with particles of one and more than different absorbing agents with the average size of a particle smaller than 1.5mm; and re-collecting the purified cryogenic fluid containing lower than 100ppb of impurities. The cryogenic fluid is selected from oxygen, argon, hydrogen, nitrogen and helium. Also, at least a part of impurities contained in the cryogenic fluid is removed through the absorption with particles of the absorbing agent or the chemical absorption.