| 摘要 |
PURPOSE: A method for producing an integrated circuit by using a scanning system is provided to vary the depth of a focus by moving a substrate, a mask, or the both and to oscillate the depth of the focus according to the periodical wavelength to the substrate, on which the wavelength passing through an exposed field. CONSTITUTION: A substrate(200) having an image field(300) is prepared. And an exposed field is generated, and the image field is moved toward a first direction under the exposed field having the same depth with a focus. And then, the image field is moved toward a second direction for varying the depth of the focus from a first focus +to a second focus to produce an integrated circuit. Herein, the movements toward the first and the second directions are operated at the same time.
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