POLYMER-BASED ELECTROSPRAY NOZZLE FOR MASS SPECTROMETRY
摘要
A MEMS device with an overhanging "polymer" capillary (20) provides vital and significant improvements in interfacing a MEMS electrospray nozzle (50) to an MS inlet or other macroscopic instrumentation. The fabrication methodology associated therewith is easily expanded to include built-in micro particle filters (71) and centimeter long serpentine micro channels (75) provided on-chip (19) and fabricated using a low temperature process.
申请公布号
WO0030167(A1)
申请公布日期
2000.05.25
申请号
WO1999US27500
申请日期
1999.11.18
申请人
CALIFORNIA INSTITUTE OF TECHNOLOGY
发明人
TAI, YU-CHONG;WANG, XUAN-QI;DESAI, AMISH;LEE, TERRY, D.;LICKLIDER, LAWRENCE