Micro-mirror, especially for IR scanning, structural laser applications or vehicle interior optical sensing, has an imaging element comprising a monolithic membrane body curved by a permanently induced mechanical stress

摘要

The micro-mirror has an imaging element (20) comprising a monolithic membrane body (15) curved by a permanently induced mechanical stress. An Independent claim is also included for production of the above micro-mirror. Preferred Features: The membrane body (15) consists of silicon and has a tensile stressed layer (11) of gold, silicon nitride, silicon oxynitride or silicon-rich silicon oxide.